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Comparison with previous performance for Ge30Si70
This panel compares the performance of the electron microscope with and without the aberration correction. In the top panels, we show a "shadow map" pattern that tells us about the quality of the optical system. The featureless "patch" in the middle is an area that transmits electrons faithfully to make the very small electron beam. The bigger the patch, the better. In the middle, we show the image results. On the left, we cannot resolve the pairs atom columns in Si that are separated by 0.135 nanometers. On the right, these pairs are easily resolved. The patterns at the bottom, again, indicate the faithfulness with which we image the structure. The greater number of spots on the right indicate that smaller spatial distances are being reproduced on the right.
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