Publications



C. T. Black and R. Ruiz, Self Assembly in Semiconductor Microelectronics: Self-Aligned Sub-Lithographic Patterning Using Diblock Copolymer Thin Films, Proc. SPIE 6153, 615302 (2006).



C. T. Black, Self-Aligned, Self Assembly of Multi-Nanowire Silicon Field Effect Transistors, Applied Physics Letters, 87, 163116 (2005).


C. T. Black, Integration of Self Assembly for Microelectronics, Proceedings of the IEEE Custom Integrated Circuits Conference, (2005).


C. T. Black and O. Bezencenet, Nanometer-Scale Pattern Registration and Alignment by Directed Diblock Copolymer Self Assembly, IEEE Transactions on Nanotechnology, 3, 412 (2004).


C. T. Black, K. W. Guarini, Y. Zhang, H. Kim, J. Benedict,, E. Sikorski, I. V. Babich, and K. R. Milkove, High-Capacity, Self-Assembled, Metal-Oxide-Semiconductor Decoupling Capacitors, IEEE Electron Device Letters, 26, 622 (2004).


C. T. Black and K. W. Guarini, Structural Evolution of Cylindrical Phase Diblock Copolymer Thin Films, J. Poly. Sci. Part A 42, 1970 (2004).


K. W. Guarini, C. T. Black, Y. Zhang, I. V. Babich, E. M. Sikorski, and L. M. Gignac, Low Voltage, Scalable Nanocrystal FLASH Memory Fabricated by Templated Self Assembly, IEEE Electron Devices Meeting Technical Digest, 541 (2003).


K. W. Guarini, C. T. Black, and S. Yeung, Optimization of Diblock Copolymer Thin Film Self Assembly, Adv. Mat. 14, 1290 (2002).


C. T. Black and K. W. Guarini, Diblock Copolymers: Self-Assembly for Applications in Microelectronics, Encyclopedia of Materials: Science and Technology (online), Elsevier (2002).


K. W. Guarini, C. T. Black, Y. Zhang, H. Kim, E. M. Sikorski, and I. V. Babich, Process Integration of Self-Assembled Polymer Templates into Silicon Nanofabrication, J. Vac. Sci. Tech. B 20, 2788 (2002).


C. T. Black, K. W. Guarini, R. L. Sandstrom, S. Yeung, and Y. Zhang, Formation of Nanometer-Scale Dot Arrays from Diblock Copolymer Templates, Mat. Res. Soc. Symp. Proc., 728, S491 (2002).


K.W. Guarini, C.T. Black, K.R. Milkove, R.L. Sandstrom, Sub-Lithographic Patterning Using Self-Assembled Polymers for Semiconductor Applications, J. Vac. Sci. Tech. B, 19 2784 (2001).


C. T. Black, K.W. Guarini, K.R. Milkove, S.M. Baker, T. P. Russell, M.T. Tuominen, Integration of Self-Assembled Diblock Copolymers for Semiconductor Capacitor Fabrication, Appl. Phys. Lett. 79, 409 (2001).