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IBM Journal of Research and Development  
Volume 44, Number 3, Page 369 (2000)
Directions in information technology
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The future of CMOS technology

by R. D. Isaac
The performance of integrated circuits has been improving exponentially for more than thirty years. During the next decade, the industry must overcome several technological challenges to sustain this remarkable pace of improvement. Challenges in lithography, transistor scaling, interconnections, circuit families, computer memory, and circuit design are outlined. Possible solutions are briefly discussed. The ways in which these challenges will affect future growth in the industry are considered.
Related Subjects: Circuit and device technology; CMOS; Device design; Dielectrics; Fabrication; Integrated circuits; Lithography; Logic design and technology; Semiconductor technology; Silicon; Transistors