IBM Journal of Research and Development
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Related Papers
2006Optimizing CMOS technology for maximum performance
2006Ultralow-voltage, minimum-energy CMOS
2005Development of next-generation system-on-package (SOP) technology based on silicon carriers with fine-pitch chip interconnection
2002Beyond the conventional transistor
2002Maintaining the benefits of CMOS scaling when scaling bogs down
2002New insights into carrier transport in n-MOSFETs
2002Why BiCMOS and SOI BiCMOS?
2000The future of CMOS technology
1999Cost-effective cleaning and high-quality thin gate oxides
1999Growth and characterization of ultrathin nitrided silicon oxide films
1999Plasma-assisted oxidation, anodization, and nitridation of silicon
1999Plasma-etching processes for ULSI semiconductor circuits
1999Scaling the gate dielectric: Materials, integration, and reliability
1998Photoelectrochemical etching of semiconductors
1995Atomic force microscopy studies of SiGe films and Si/SiGe heterostructures
1995Probing electrical transport, electron interference, and quantum size effects at surfaces with STM/STS
1966Dislocation-Induced Deviation of Phosphorus-Diffusion Profiles in Silicon
1965Observations of “Clean” Surfaces of Si, Ge, and GaAs by Low-Energy Electron Diffraction
1965Vapor-Phase Polishing of Silicon with H2–HBr Gas Mixtures
1964Calculation of the Capacitance of a Semiconductor Surface, with Application to Silicon
1964Carrier Surface Scattering in Silicon Inversion Layers
1964Chemical and Ambient Effects on Surface Conduction in Passivated Silicon Semiconductors
1964Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si–SiO2–Al System
1964Effect of Temperature and Bias on Glass-Silicon Interfaces
1964Electrochemical Phenomena in Thin Films of Silicon Dioxide on Silicon
1964Space-Charge Model for Surface Potential Shifts in Silicon Passivated with Thin Insulating Layers
1964Stabilization of SiO2 Passivation Layers with P2O5
1964Surface Effects on Silicon: Introduction
1964The Equilibrium Behavior of the Silicon–Hydrogen–Chlorine System
1961Acoustic-Mode Mobilities for “Split-p-Silicon”
1960Epitaxial Growth of Silicon
1960Impurity Introduction during Epitaxial Growth of Silicon