IBM Journal of Research and Development
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IBM Journal of Research and Development

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Show details for IBM Journal of Research and Development - Volume 52 (2008)IBM Journal of Research and Development - Volume 52 (2008)
Show details for IBM Journal of Research and Development - Volume 51 (2007)IBM Journal of Research and Development - Volume 51 (2007)
Show details for IBM Journal of Research and Development - Volume 50 (2006)IBM Journal of Research and Development - Volume 50 (2006)
Show details for IBM Journal of Research and Development - Volume 49 (2005)IBM Journal of Research and Development - Volume 49 (2005)
Show details for IBM Journal of Research and Development - Volume 48 (2004)IBM Journal of Research and Development - Volume 48 (2004)
Show details for IBM Journal of Research and Development - Volume 47 (2003)IBM Journal of Research and Development - Volume 47 (2003)
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Show details for IBM Journal of Research and Development - Volume 45 (2001)IBM Journal of Research and Development - Volume 45 (2001)
Show details for IBM Journal of Research and Development - Volume 44 (2000)IBM Journal of Research and Development - Volume 44 (2000)
Hide details for IBM Journal of Research and Development - Volume 43 (1999)IBM Journal of Research and Development - Volume 43 (1999)
Hide details for Issue 1/2Issue 1/2
Page 3Preface by Y. Kuo
Page 5Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits by D. R. Cote, S. V. Nguyen, A. K. Stamper, D. S. Armbrust, D. Tobben, R. A. Conti, G. Y. Lee
Page 39Plasma-etching processes for ULSI semiconductor circuits by M. Armacost, P. D. Hoh, R. Wise, W. Yan, J.J. Brown, J. H. Keller, G. A. Kaplita, S. D. Halle, K. P. Muller, M. D. Naeem, S. Srinivasan, H. Y. Ng, M. Gutsche, A. Gutmann, B., Spuler
Page 73Plasma processing in the fabrication of amorphous silicon thin-film-transistor arrays by Y. Kuo, K. Okajima, M. Takeichi
Page 89Fabrication of magnetic recording heads and dry etching of head materials by R. Hsiao
Page 103Plasma processing damage in etching and deposition by S. J. Fonash
Page 109High-density plasma chemical vapor deposition of silicon-based dielectric films for integrated circuits by S. V. Nguyen
Page 127Plasma-assisted oxidation, anodization, and nitridation of silicon by D. W. Hess
Page 147Plasma-deposited diamondlike carbon and related materials by A. Grill
Page 163Sputter deposition for semiconductor manufacturing by S. M. Rossnagel
Page 181Surface science issues in plasma etching by G. S. Oehrlein, M. F. Doemling, B. E. E. Kastenmeier, P. J. Matsuo, N. R. Rueger, M. Schaepkens, T. E. F. M. Standaert
Page 199Modeling and simulation methods for plasma processing by S. Hamaguchi
Page 217Recent publications by IBM authors
Page 227Recent IBM patents
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Show details for IBM Journal of Research and Development - Volume 42 (1998)IBM Journal of Research and Development - Volume 42 (1998)
Show details for IBM Journal of Research and Development - Volume 41 (1997)IBM Journal of Research and Development - Volume 41 (1997)
Show details for IBM Journal of Research and Development - Volume 40 (1996)IBM Journal of Research and Development - Volume 40 (1996)
Show details for IBM Journal of Research and Development - Volume 39 (1995)IBM Journal of Research and Development - Volume 39 (1995)
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Show details for IBM Journal of Research and Development - Volume 35 (1991)IBM Journal of Research and Development - Volume 35 (1991)
Show details for IBM Journal of Research and Development - Volume 34 (1990)IBM Journal of Research and Development - Volume 34 (1990)
Show details for IBM Journal of Research and Development - Volume 33 (1989)IBM Journal of Research and Development - Volume 33 (1989)
Show details for IBM Journal of Research and Development - Volume 32 (1988)IBM Journal of Research and Development - Volume 32 (1988)
Show details for IBM Journal of Research and Development - Volume 31 (1987)IBM Journal of Research and Development - Volume 31 (1987)
Show details for IBM Journal of Research and Development - Volume 30 (1986)IBM Journal of Research and Development - Volume 30 (1986)
Show details for IBM Journal of Research and Development - Volume 29 (1985)IBM Journal of Research and Development - Volume 29 (1985)
Show details for IBM Journal of Research and Development - Volume 28 (1984)IBM Journal of Research and Development - Volume 28 (1984)
Show details for IBM Journal of Research and Development - Volume 27 (1983)IBM Journal of Research and Development - Volume 27 (1983)
Show details for IBM Journal of Research and Development - Volume 26 (1982)IBM Journal of Research and Development - Volume 26 (1982)
Show details for IBM Journal of Research and Development - Volume 25 (1981)IBM Journal of Research and Development - Volume 25 (1981)
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Show details for IBM Journal of Research and Development - Volume 23 (1979)IBM Journal of Research and Development - Volume 23 (1979)
Show details for IBM Journal of Research and Development - Volume 22 (1978)IBM Journal of Research and Development - Volume 22 (1978)
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Show details for IBM Journal of Research and Development - Volume 14 (1970)IBM Journal of Research and Development - Volume 14 (1970)
Show details for IBM Journal of Research and Development - Volume 13 (1969)IBM Journal of Research and Development - Volume 13 (1969)
Show details for IBM Journal of Research and Development - Volume 12 (1968)IBM Journal of Research and Development - Volume 12 (1968)
Show details for IBM Journal of Research and Development - Volume 11 (1967)IBM Journal of Research and Development - Volume 11 (1967)
Show details for IBM Journal of Research and Development - Volume 10 (1966)IBM Journal of Research and Development - Volume 10 (1966)
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Show details for IBM Journal of Research and Development - Volume 6 (1962)IBM Journal of Research and Development - Volume 6 (1962)
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Show details for IBM Journal of Research and Development - Volume 2 (1958)IBM Journal of Research and Development - Volume 2 (1958)
Show details for IBM Journal of Research and Development - Volume 1 (1957)IBM Journal of Research and Development - Volume 1 (1957)